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172nm VUV TOC reduction module

172nm VUV TOC reduction module

  • 172nm Excimer Module for Cold Plate Organic Particle Removal TOC Reduction & Water Purification

    Engineered for ultrapure water (UPW) systems, this eco-friendly, mercury-free 172nm VUV module triggers powerful radical oxidation to reduce TOC down to ppb levels. By converting organic compounds into trace CO₂ and H₂O, it delivers an ideal water-purification solution for semiconductors, pharmaceuticals, and laboratories. Its smart modular design simplifies onsite maintenance and system scaling, with custom power levels and flow rates fully supported.

    Semiconductor UPW TOC

    Pharma Pure Water TOC

    Lab Ultrapure Water

    Online TOC Reduction Systems

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