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172nm Excimer Lamp

172nm Excimer Lamp

  • 172nm Excimer Lamp Module Semiconductor Wafer & Mask UV Cleaning FMM/Invar Film Matting
    It eliminates nanoscale organic contaminants. Widely used for semiconductor wafer UV cleaning, FMM fine metal mask cleaning, Invar mask cleaning, OLED evaporation mask cleaning and photomask cleaning. PCB UV cleaning, and excimer UV matting in roller coating lines. It serves as a cost-effective alternative for Hamamatsu and Ushio 172nm excimer lamps.

    Wafer & FMM cleaning

    Film matting & coating

    Cold plate organic particle removal

    Hydrophilic modification

  • 172nm Excimer Module for Cold Plate Organic Particle Removal TOC Reduction & Water Purification

    Engineered for ultrapure water (UPW) systems, this eco-friendly, mercury-free 172nm VUV module triggers powerful radical oxidation to reduce TOC down to ppb levels. By converting organic compounds into trace CO₂ and H₂O, it delivers an ideal water-purification solution for semiconductors, pharmaceuticals, and laboratories. Its smart modular design simplifies onsite maintenance and system scaling, with custom power levels and flow rates fully supported.

    Semiconductor UPW TOC

    Pharma Pure Water TOC

    Lab Ultrapure Water

    Online TOC Reduction Systems

  • 172nm Excimer VUV Light Source

    Enhance your surface treatment precision with GMY’s 172nm Excimer Lamps. Utilizing advanced photochemical oxidation, our mercury-free 172nm UV light solutions effectively break down organic contaminants to achieve atomic-level cleanliness on semiconductor wafers, display substrates, and optical devices.

    Display Substrates

    Semiconductor Silicon WafersIntegrated Circuits

    Integrated Circuits

    Optical Devices

    LCDs Production

    Electronic Paper

    AR Lenses

    Micro-Nano Manufacturing

  • High Power 172nm Excimer Lamp Matte Surface Photocuring Coating Modification

    Discover GMY's high-efficiency 172nm excimer lamps for industrial photocuring. Mercury-free, powerful 350W-1000W VUV light for rapid surface crosslinking, matte finishing, and PPF/PCB coating modification. Compared to traditional UV curing, it shortens curing time and enhances surface modification effects.

    Paint Protection Films

    Soft-Touch Panels

    Coating Equipment

    Paper & Packaging Inks

    Furniture Inks

    Automotive Inks & Related Coatings

    Pigmented & Clear Coatings

    PCB Inks

    Adhesive Coatings

    3D Printing

     

  • 172nm Dental Implant Hydrophilic Activation Module

    The GMY 172nm Photomodification Module serves as the premier vacuum-compatible solution for activating the hydrophilicity of dental implants. Through precise 172nm excimer technology, the module purifies titanium surfaces by breaking down organic hydrocarbons, which drastically enhances TiO2 bioactivity and osseointegration. Designed for seamless device integration, this module stands out with its high power output, minimal thermal impact, rapid reaction cycle, and extensive, homogeneous beam coverage.

    Surface Modification

    Organic Contaminants Removal

    Ultra-fine Cleaning

  • 172nm Mini Excimer Lamp Module For Semiconductor Processing

    The 172nm MINl excimer module is a compact,plug-and-play desktop solution for semiconductor R&D and laboratory validation. Delivering short-wave vacuum ultraviolet (VUV) radiation, it cleaves molecular bonds to eliminate organic contaminants and modify surface energy without substrate damage, providing an agile process-validation platform for research labs and universities.

    Flexible display

    Optical thin films

    Pretreatment before coating

  • 172nm Excimer High-energy UV Cleaning Device Semiconductor Battery Surface Modification

    The 172nm Excimer UV Device delivers high-energy photo-cleaning and nano-level surface modification for semiconductors, batteries, and advanced materials. Utilizing cold 172nm UV photons, this compact system breaks organic chemical bonds and oxidizes contaminants without substrate damage. With a high uniformity of ±15% and operating temperatures under 40°C, it provides an eco-friendly, low-consumption alternative to traditional low-pressure mercury lamps.

    Pre-Bonding Surface Activation R&D

    Pre-Deposition Wafer Cleaning Trials

    FMM & Photomask Damage-Free Cleaning

    Advanced Material Surface Modification

  • Ultrapure Water TOC Degradation 172nm Excimer Lamp

    GMY 172nm excimer lamps offer high-energy VUV radiation to degrade TOC to ppb levels in ultrapure water. Mercury-free 15W/20W lamps for industrial water treatment. By generating free radicals, our UV light systems oxidize organic matter into CO₂ and H₂O molecules. This advanced technology is particularly suitable for ultra-pure water production.

    Ultrapure Water TOC Removal

    Drinking Water Trace Pollutants

    Decomposition of Pesticide Residues

    Textile Dye Wastewater Treatment

    High-Purity Ozone Generation

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If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.
Contact Us:jwtan@gmyok.com