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172nm Excimer VUV Light Source
custom UV lamp manufacturer
excimer inline cleaning lamp
flat panel display cleaning UV light
semiconductor wafer dry cleaning UV light

172nm Excimer VUV Light Source

Enhance your surface treatment precision with GMY’s 172nm Excimer Lamps. Utilizing advanced photochemical oxidation, our mercury-free 172nm UV light solutions effectively break down organic contaminants to achieve atomic-level cleanliness on semiconductor wafers, display substrates, and optical devices.

  • Product Specifications

    Model Power (W) UV Irradiance @6mm Size (Diameter × Length) Emission Length Cooling Method Dielectric Barrier Discharge Type Power Supply Model Application
    Cleaning Modification Curing Ultrapure Water / TOC Degradation
    172E1000D40×1532 1000W > 65 mW/cm² φ40 × 1532 mm 1390 mm Water Double Dielectric MC -
    172E860D40×957 860W > 65 mW/cm² φ40 × 957 mm 860 mm Nitrogen Double Dielectric MC -
    172E800D40×1750 800W > 65 mW/cm² φ40 × 1750 mm 1598 mm Nitrogen Single Dielectric MC -
    172E500D40×495 500W > 65 mW/cm² φ40 × 495 mm 353 mm Nitrogen Single Dielectric MC -
    172E350D40×495 350W > 65 mW/cm² φ40 × 495 mm 353 mm Water Double Dielectric MC -
    172E180D26.5×460 180W > 75 mW/cm² φ26.5 × 460 mm 350 mm Water Double Dielectric MC -
    172E350D26.5×730 350W > 60 mW/cm² φ26.5 × 730 mm 620 mm Water Double Dielectric MC -
    172E15D16.5×80 15W > 23 mW/cm² φ16.5 × 80 mm 55 mm / Single Dielectric ZX - - -
    172E20D16.5×141 20W > 25 mW/cm² φ16.5 × 141 mm 75 mm / Single Dielectric ZX - - -
    172E5D9×85 5W > 10 mW/cm² φ9 × 85 mm 50 mm / Single Dielectric ZX - - -

    Note: Custom specifications for power, size, and matching power supplies are available upon request.

    172nm Excimer Lamps - Photocleaning

    Enhance your surface treatment precision with GMY’s 172nm Excimer Lamps. Utilizing photochemical oxidation, our mercury-free 172nm UV light solutions effectively break down organic contaminants to achieve atomic-level cleanliness on semiconductor wafers, display substrates, and optical devices.

    The 172nm Excimer Lamp is a next-generation vacuum ultraviolet light source engineered specifically for high-efficiency dry cleaning and surface modification. Operating on the principle of direct photochemical oxidation, the 172nm VUV photons carry energy to break molecular bonds of organic contaminants on the material's surface. Simultaneously, the light reacts with ambient oxygen leaving the target surface at an atomic cleanliness level without damaging the substrate structure.

    Our Advantages

    • 01. Customized solutions based on your application demands
    • 02. 10 days delivery from design to production
    • 03. Zero development cost | Customizable for single unit

    Application Fields

    Photo-cleaning process Excimer Lamps PROCESS OF CLEANING BY EXCIMER excimer light

    Photo-cleaning

    172nm excimer light excites free radicals on organic surfaces, which combine with oxygen radicals in an oxidation reaction to efficiently break down organics into water and CO2, achieving atomic-level cleanliness. Material cleaning for display substrates, semiconductor silicon wafers, integrated circuits, optical components, LCDs, e-paper, AR lenses, and micro-nano manufacturing.

    Photo-curing

    172nm excimer light rapidly initiates polymerization reactions. Through innovative processing techniques, it ensures firm adhesion of inks with bright, long-lasting colors while providing a matte, smooth finish with anti-fingerprint properties. Curing of paint protection films (PPF), skin-feel panels, coating equipment, paper inks, packaging inks, furniture inks, automotive inks and related coatings, colored and clear paints, PCB inks, adhesive coatings, and 3D printing materials.

    Photo-curing process Excimer Lamps
    Photo-modification process Excimer Lamps

    Photo-modification

    172nm excimer light sources are used for surface modification of materials to enhance properties such as surface hydrophilicity and adhesion. Surface modification for processes including pre-treatment for film deposition, MEMS packaging, 3D packaging, wafer bonding, as well as hydrophilic modification of dental implants, battery materials, titanium, aluminum foil, and other materials.

    Ultrapure Water TOC Degradation

    High-energy 172nm excimer light is used to efficiently and rapidly degrade total organic carbon (TOC) in water to ppb levels, meeting ultrapure water quality standards. TOC removal in ultrapure water production, treatment of trace organic pollutants in drinking water, degradation of pesticide residues, photocatalytic decolorization of textile dyeing wastewater, and high-purity ozone generation.

     

    Ultrapure Water TOC Degradation excimer light

    Key Features

    01 Mercury-Free Operation

    100% eco-friendly vacuum UV treatment fully compliant with international RoHS restrictions, eliminating dangerous mercury hazards and disposal risks from cleanrooms.

    02 Highly Energetic Photons Generate Hydroxyl Radicals (HO*)

    Emits high-energy VUV wavelengths to continuously ionize ambient oxygen molecules, producing heavy-density reactive hydroxyl radicals (HO*) for rapid organic bond cleavage.

    03 Consistent Quality & Reliable Delivery with Large Production Capacity

    Backed by mass industrial scale manufacturing lines, ensuring complete batch uniformity, rigorous pre-shipment aging tests, and bulletproof supply chain reliability.

    04 Customizable Lamp Design for Flexible Application

    Tailored arc lengths, envelope dimensions, multi-pin electrical cap terminals, and matching ballast controls to achieve seamless mechanical integration into custom tools.

    Certifications & Compliance

    ISO Certificate
    ISO

    ISO 9001/14001

    Certified quality management system ensuring premium manufacture standard.

    CE Certified Declaration
    CE

    CE Certified

    Fully compliant with European health, safety, and environmental protection legislation.

    ROHS Compliance Certificate
    RoHS

    ROHS Compliant

    Eco-friendly manufacture completely free from hazardous substances.

    UL Safety Certificate
    UL

    UL Certified

    Premium North American electric security and fire prevention compliance standard.

    FAQ

    Q What makes 172nm excimer lamps superior to traditional 185nm UV lamps for photocleaning?

    Unlike low-pressure mercury lamps (185nm/254nm), the 172nm excimer light emits significantly higher single-photon energy capable of directly severing strong carbon-carbon molecular bonds within organic compounds. Additionally, 172nm light features exceptionally high absorption coefficients in common air layers, allowing it to generate high-density hydroxyl radicals ($HO^\bullet$) and native ozone concurrently, accelerating the organic contamination clearance rate exponentially.

    Q Are these industrial high-power excimer lamps mercury-free?

    Yes, all GMY 172nm excimer lamps operate via completely mercury-free dielectric barrier discharges (DBD). This aligns fully with strict green factory standards, RoHS legislation, and modern environmental guidelines, making them safe for cleanroom facilities and simple to dispose of at life's end.

    Q Can we integrate these lamps directly into automated high-speed conveyor lines?

    Absolutely. Thanks to the instant-on operational design of excimer technology, these lamps do not require the extensive warm-up periods associated with mercury bulbs. They can cycle on and off instantly with conveyor triggers, preventing thermal loading during unexpected system stalls and enabling massive integration flexibility.
leave a message
If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.

leave a message

leave a message
If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.
Contact Us:jwtan@gmyok.com