172nm Mini Excimer Lamp Module For Semiconductor Processing

The 172nm MINl excimer module is a compact,plug-and-play desktop solution for semiconductor R&D and laboratory validation. Delivering short-wave vacuum ultraviolet (VUV) radiation, it cleaves molecular bonds to eliminate organic contaminants and modify surface energy without substrate damage, providing an agile process-validation platform for research labs and universities.

Model :
EX-D75-1
Central Irradiance (@1mm) :
>10mW/cm²
Irradiance Uniformity :
±10%
Time to Reach 90% Output :
≤5 seconds
Average Lamp Lifetime :
>1000 hours
Cooling Method :
Air cooling
Module Dimensions (L×W×H) :
209×142×69 mm
Window Opening Size (L×W) :
75×50 mm

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172nm MINI-Excimer Experimental Module

The 172nm MINI Excimer Experimental Module is designed for semiconductor process R&D, process validation, and small-scale pilot trials. With a highly integrated, book-sized form factor, it provides a cost-effective entry point for early-stage development. Plug-and-play and portable, it fits seamlessly into standard laboratory and optical breadboard setups.

This module effectively removes organic contaminants on wafer, glass, and plastic surfaces, improving surface cleanliness and adhesion. It serves as a reliable pre-treatment solution for packaging, cleaning, and other process applications. Air-cooled and capable of reaching 90% light output within 5 seconds, it delivers consistent irradiance uniformity for repeatable experimental results.

Application Fields

Semiconductor Packaging — Pre-Bonding Activation R&D

R&D teams use the EX-C300 to dial in optimal 172nm VUV parameters — dose, working distance, and cycle time — for activating die-attach, flip-chip, and hybrid bonding surfaces. The benchtop format delivers repeatable surface energy data, forming a validated bonding recipe before production handoff.

Wafer & Substrate — Pre-Deposition Organic Cleaning

Researchers treat bare and patterned test wafers with 172nm VUV photons to establish cleanliness baselines prior to ALD, CVD, or PVD. Sub-40°C operation eliminates any thermal budget risk, while post-treatment XPS and contact angle data define the minimum effective dose for process qualification.

FMM & Photomask — Damage-Free Organic Cleaning

The EX-C300 removes organic fouling on fine metal masks and photomasks via purely photochemical oxidation — no contact, no chemicals, no residues. Iterative trials confirm that nanometer-scale mask features remain intact, defining safe cumulative dose and cycle limits for production adoption.

Advanced Materials — Surface Modification & Wettability Control

Film and battery R&D labs treat polymer films (PET, PI, COP) and electrode foils under controlled 172nm exposure, then measure contact angle reduction and adhesion gains. The cold-photon process avoids thermal damage to sensitive materials, and the resulting data directly feeds into inline production recipes — bench before fab.

Key Features

01 Portable design

Compact and lightweight, desktop-ready plug-and-play design.

02 Rapid ignition

High-intensity 172nm UV output, rapid 5-second stable ignition.

03 Stable output

Uniform irradiance for consistent and reliable processing results.

04 Air cooling

Air-cooled, no external cooling system required.

05 Customized service

Customizable application solutions and contract experimental services available.

Certifications & Compliance

ISO

ISO 9001/14001

Certified quality management system ensuring premium manufacture standard.

CE

CE Certified

Fully compliant with European health, safety, and environmental protection legislation.

RoHS

ROHS Compliant

Eco-friendly manufacture completely free from hazardous substances.

UL

UL Certified

Meets stringent North American electrical insulation, grounding, and operational safety criteria.

FAQ

Q What are the primary applications of the EX-D75-1 172nm module?

The module is specifically designed for surface pre-treatment in laboratories and pilot lines. Its main applications include the removal of trace organic contaminants from wafers and glass, surface activation and modification of plastics or polymers to enhance adhesion, and process validation for ultra-fine cleaning before scaling up to large-scale automated manufacturing.

Q Does this 172nm mini excimer module require an external cooling system?

No external water chillers or complex cooling infrastructure are required. The EX-D75-1 features an integrated forced air-cooling method, maintaining a lightweight and compact desktop-ready design that effortlessly adapts to various limited lab environments, including glove boxes.

Q How fast can the module achieve stable light output for testing?

The module features instant-on capability and rapid stable ignition, reaching 90% of its total rated light output within ≤5 seconds. This drastically reduces downtime between intermittent laboratory process testing and ensures high irradiance uniformity (±10%) for reliable data acquisition.