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VUV surface cleaning Module

VUV surface cleaning Module

  • 172nm excimer lamp module
    172nm Excimer Lamp Module Semiconductor Wafer & Mask UV Cleaning FMM/Invar Film Matting
    It eliminates nanoscale organic contaminants. Widely used for semiconductor wafer UV cleaning, FMM fine metal mask cleaning, Invar mask cleaning, OLED evaporation mask cleaning and photomask cleaning. PCB UV cleaning, and excimer UV matting in roller coating lines. It serves as a cost-effective alternative for Hamamatsu and Ushio 172nm excimer lamps.

    Wafer & FMM cleaning

    Film matting & coating

    Cold plate organic particle removal

    Hydrophilic modification

    Learn More

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If you are interested in our products and want to know more details,please leave a message here,we will reply you as soon as we can.
Contact Us:jwtan@gmyok.com